Bromine/methanol wet chemical etching of via holes for InP microwave devices
نویسندگان
چکیده
منابع مشابه
InP-based Waveguides: comparison of ECR Plasma Etching and Wet-chemical Etching
1 COBRA Inter-University Research Institute on Communication Technology Eindhoven University of Technology –Faculty of Electrical Engineering Telecommunications Technology and Electromagnetics – Opto-Electronic Devices Group P.O.Box 513, 5600 MB Eindhoven, The Netherlands E-mail: [email protected] 2 Department of Electronic Materials Engineering, Research School of Physical Sciences and En...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 1998
ISSN: 0734-211X
DOI: 10.1116/1.589863